2

A theory on planar magnetron discharge

Year:
1996
Language:
english
File:
PDF, 306 KB
english, 1996
6

Copper Self-Sputtering by Planar Magnetron

Year:
1994
Language:
english
File:
PDF, 232 KB
english, 1994
12

Performance of a Pumping System Combining Ion-Pump with Titanium Sublimation Pump

Year:
1965
Language:
english
File:
PDF, 1.31 MB
english, 1965